E-ISSN 2705-3954 | ISSN 0794-4756
 

Original Research 


Nonlinear Analysis of Micro-Electromechanical Flow Sensors

A. A. Abubakar; M. A. Dalhat; Z. A. Bello.

Abstract
Micro-Electro-Mechanical (MEM) sensors have been used in various applications such as drug discovery, disease diagnosis, detection and characterization of materials, detection of fluid flow parameters, etc. With these devices, sensing is commonly achieved via detection in change of stress/strain/mass with beam static deflection/frequency. In the present study, the behavior of a MEM flow sensor under electrostatic as well as external mechanical loading due to crossflow of non-viscous fluid is modeled. Hamiltonís principle was used to derive the governing equations and the numerical solution was obtained with MATLAB code via finite difference. The model is studied with respect to the basic controllable parameters such as voltage input, initial gap, and maximum flow velocity. The results show that nonlinear relationship exists between the velocity of the moving fluid and the pull-in voltage of cantilever beam. Thus, with proper calibration the velocity of the fluid at any instant can be obtained

Key words: Cantilever beam; Electrostatic actuation; Fluid flow; Hamiltonís principle; Micro-electro-mechanical sensor


 
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How to Cite this Article
Pubmed Style

Abubakar AA, Dalhat MA, Bello ZA. Nonlinear Analysis of Micro-Electromechanical Flow Sensors . NJE. 2021; 28(2): 1-6.


Web Style

Abubakar AA, Dalhat MA, Bello ZA. Nonlinear Analysis of Micro-Electromechanical Flow Sensors . http://www.njeabu.com.ng/?mno=122487 [Access: September 10, 2021].


AMA (American Medical Association) Style

Abubakar AA, Dalhat MA, Bello ZA. Nonlinear Analysis of Micro-Electromechanical Flow Sensors . NJE. 2021; 28(2): 1-6.



Vancouver/ICMJE Style

Abubakar AA, Dalhat MA, Bello ZA. Nonlinear Analysis of Micro-Electromechanical Flow Sensors . NJE. (2021), [cited September 10, 2021]; 28(2): 1-6.



Harvard Style

Abubakar, A. A., Dalhat, . M. A. & Bello, . Z. A. (2021) Nonlinear Analysis of Micro-Electromechanical Flow Sensors . NJE, 28 (2), 1-6.



Turabian Style

Abubakar, A. A., M. A. Dalhat, and Z. A. Bello. 2021. Nonlinear Analysis of Micro-Electromechanical Flow Sensors . Nigerian Journal of Engineering, 28 (2), 1-6.



Chicago Style

Abubakar, A. A., M. A. Dalhat, and Z. A. Bello. "Nonlinear Analysis of Micro-Electromechanical Flow Sensors ." Nigerian Journal of Engineering 28 (2021), 1-6.



MLA (The Modern Language Association) Style

Abubakar, A. A., M. A. Dalhat, and Z. A. Bello. "Nonlinear Analysis of Micro-Electromechanical Flow Sensors ." Nigerian Journal of Engineering 28.2 (2021), 1-6. Print.



APA (American Psychological Association) Style

Abubakar, A. A., Dalhat, . M. A. & Bello, . Z. A. (2021) Nonlinear Analysis of Micro-Electromechanical Flow Sensors . Nigerian Journal of Engineering, 28 (2), 1-6.